=== 光刻曝光参数计算器 ===
Version: v1.0
Platform: Windows, Python 3.8+

[Function]
Calculate lithography exposure parameters:
  - Depth of Focus DOF (nm)
  - Effective k1
  - Exposure Latitude EL (%)
  - Minimum CD (nm)
  - Best Focus Offset (nm)
Draws dose-focus clustering heatmap and DOF window analysis chart.

[Usage]
1. Run: python 光刻曝光参数计算器.py
2. Enter parameters and click "Calculate"
3. Or click "Example Data" for built-in sample

[Sample Data]
Lambda: 193 nm (ArF)
NA: 0.85
Dose: 25.0 mJ/cm2
Resist thickness: 200 nm
k1: 0.35

[Dependencies]
Python 3.8+, numpy, matplotlib
